Published Horizontal buried channels in monocrystalline silicon Published on 30 April 2005 - Conf. Proc. of DTIP of MOEMS & MEMS 2005 Authors: Olivier de Sagazan, Matthieu Denoual, P. Guil, D. Gaudin, Bruno Le Pioufle, Olivier Bonnaud See the publication on HAL Prev. Back to the list Next
