Published

Microelectronics

Fabrication and characterization of resonant SOI micromechanical silicon sensors based on DRIE micromachining, freestanding release process and silicon direct bonding

Published on - SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems

Authors: Olivier Gigan, Hua Chen, Olivier Robert, Gilles Amendola, Olivier Français, Frédéric Marty

See the publication on HAL DOI