High-throughput single-cell electroporation microchip with three dimensional si microelectrodes for gene transfection

We present details on fabrication of electroporation microchip, practical experiments of single-cell electroporation with our fabricated microchip. Also, the continuous electroporation for the continuous flow of cells is used for high-throughput electroporation. The delivery efficiency and cell viability tests are provided and the successful GFP transfection into cells is also evaluated with a fluorescent microscope after electroporation.