Microelectronics

Z-Axis Controllable Mille-Feuille electrode electrorotation device utilizing levitation effect

Publié le - Transducers 2019 - EUROSENSORS XXXIII

Auteurs : Yuki Okamoto, Taku Tsuchiya, Charles Moslonka, Yu-Sheng Lin, Sung Tsang, Frédéric Marty, Ayako Mizushima, Chen-Li Sun, Hsiang-Yu Wang, Agnès Tixier-Mita, Olivier Français, Bruno Le Pioufle, Yoshio Mita

This paper presents a new electrorotation (ROT) device composed of thick walls and multi-electrode layers, called as mille-feuille electrode device. The proposed device has three advantages: (1) The height of a measured particle is controllable by adjusting levitation forces. (2) The rotation of the particle is not affected by the friction to the substrates. (3) The number of electrode layers is extensible.