Publié

Microelectronics

Vacuum casting of low-cost polymer microstructures for bio-chemical microsystems applications

Publié le - Micro Total Analysis Systems 2004, Vol 2

Auteurs : Matthieu Denoual, S. Prioux, Y. Mace, Pascal Mognol, Bruno Le Pioufle

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This paper reports the usage of vacuum casting to perform microscale features down to a few microns with a view to propose a rapid prototyping technique for the bio-microsystem development design flow.